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參數(shù)資料
| 型號： | S9683 |
| 廠商： | Hamamatsu Photonics |
| 英文描述： | Highly reliable photodiode for VUV detection |
| 中文描述： | 高度可靠的光電二極管的真空紫外檢測 |
| 文件頁數(shù)： | 1/2頁 |
| 文件大?。?/td> | 105K |
| 代理商： | S9683 |
S9682 and S9683 are Si photodiodes specifically designed to detect VUV (vacuum ultraviolet) radiation with high reliability. These photodiodes
are hermetically sealed in a metal package with a quartz window. There is no outgassing from the inside of the package, eliminating the cause of
decrease in VUV sensitivity.
Features
l
Highly stable sensitivity and dark current against
ArF excimer laser radiation (
λ
=193 nm)
l
Hermetically sealed metal package with quartz window
l
Large active area:
S9682: 5.8 × 5.8 mm (TO-8 metal package)
S9683: 10 × 10 mm (1 inch metal package)
Applications
l
ArF excimer laser detection
l
UV detection
P H O T O D I O D E
Si photodiode
S9682, S9683
Highly reliable photodiode for VUV detection
1
I
Absolute maximum ratings (Ta=25 °C)
Parameter
Reverse voltage
Operating temperature
Storage temperature
Symbol
V
R
Max.
Topr
Tstg
Value
5
-40 to +100
-55 to +125
Unit
V
°C
°C
I
Electrical and optical characteristics (Ta=25
°
C)
S9682
Typ.
193 to
1000
760
60
0.02
1.0
S9683
Typ.
193 to
1000
760
60
0.05
4.0
Parameter
Symbol
Condition
Min.
Max.
Min.
Max.
Unit
Spectral response range
λ
-
-
-
-
nm
Peak sensitivity wavelength
Photo sensitivity
Dark current
Terminal capacitance
λ
p
S
I
D
Ct
-
-
-
-
-
-
nm
mA/W
nA
nF
λ
=193 nm
V
R
=10 mV
V
R
=0 V, f=10 kHz
V
R
=0 V, R
L
=1 k
10 to 90 %
45
-
-
45
-
-
0.5
-
1.0
-
Rise time
tr
-
2
-
-
9
-
μs
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