參數(shù)資料
型號: MMA6261QR2
廠商: MOTOROLA INC
元件分類: 模擬信號調(diào)理
英文描述: 【1.5g Dual Axis Micromachined Accelerometer
中文描述: SPECIALTY ANALOG CIRCUIT, QCC16
封裝: 6 X 6 MM, 1.98 MM HEIGHT, QFN-16
文件頁數(shù): 4/8頁
文件大小: 124K
代理商: MMA6261QR2
Sensor Device Data
Freescale Semiconductor
4
MMA6200 SERIES
PRINCIPLE OF OPERATION
The Freescale Semiconductor accelerometer is a surface-
micromachined integrated-circuit accelerometer.
The device consists of a surface micromachined capacitive
sensing cell (g-cell) and a signal conditioning ASIC contained in
a single integrated circuit package. The sensing element is
sealed hermetically at the wafer level using a bulk microma-
chined
cap
wafer.
The g-cell is a mechanical structure formed from semicon-
ductor materials (polysilicon) using semiconductor processes
(masking and etching). It can be modeled as a set of beams at-
tached to a movable central mass that move between fixed
beams. The movable beams can be deflected from their rest
position by subjecting the system to an acceleration (Figure 2).
As the beams attached to the central mass move, the dis-
tance from them to the fixed beams on one side will increase by
the same amount that the distance to the fixed beams on the
other side decreases. The change in distance is a measure of
acceleration.
The g-cell plates form two back-to-back capacitors
(Figure 2). As the center plate moves with acceleration, the dis-
tance between the plates changes and each ca
p
acitor's value
will change, (C = A
ε
/D). Where A is the area of the plate,
ε
is the dielectric constant, and D is the distance between
the plates.
The ASIC uses switched capacitor techniques to measure
the g-cell capacitors and extract the acceleration data from the
difference between the two capacitors. The ASIC also signal
conditions and filters (switched capacitor) the signal, providing
a high level output voltage that is ratiometric and proportional to
acceleration.
Figure 2. Simplified Transducer Physical Model
SPECIAL FEATURES
Filtering
These Freescale Semiconductor accelerometers contain an
onboard single-pole switched capacitor filter. Because the filter
is realized using switched capacitor techniques, there is no re-
quirement for external passive components (resistors and ca-
pacitors) to set the cut-off frequency.
Self-Test
The sensor provides a self-test feature allowing the verifica-
tion of the mechanical and electrical integrity of the accelerom-
eter at any time before or after installation. A fourth
plate
is used
in the g-cell as a self-test plate. When a logic high input to the
self-test pin is applied, a calibrated potential is applied across
the self-test plate and the moveable plate. The resulting electro-
static force (Fe =
1
/
2
AV
2
/d
2
) causes the center plate to deflect.
The resultant deflection is measured by the accelerometer's
ASIC and a proportional output voltage results. This procedure
assures both the mechanical (g-cell) and electronic sections of
the accelerometer are functioning.
Freescale Semiconductor accelerometers include fault de-
tection circuitry and a fault latch. Parity of the EEPROM bits be-
comes odd in number.
Self-test is disabled when EEPROM parity error occurs.
Ratiometricity
Ratiometricity simply means the output offset voltage and
sensitivity will scale linearly with applied supply voltage. That is,
as supply voltage is increased, the sensitivity and offset in-
crease linearly; as supply voltage decreases, offset and sensi-
tivity decrease linearly. This is a key feature when interfacing to
a microcontroller or an A/D converter because it provides sys-
tem level cancellation of supply induced errors in the analog to
digital conversion process.
Acceleration
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MMA6262QR2 功能描述:加速計 - 板上安裝 1.5G XY LEADS RoHS:否 制造商:Murata 傳感軸:Double 加速:12 g 靈敏度: 封裝 / 箱體: 輸出類型:Analog 數(shù)字輸出 - 位數(shù):11 bit 電源電壓-最大:5.25 V 電源電壓-最小:4.75 V 電源電流:4 mA 最大工作溫度:+ 125 C 最小工作溫度:- 40 C
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MMA6263QT 制造商:Freescale Semiconductor 功能描述: